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  • 2015-08-06

    Thispageintendstopresentthedifferentmajortechniquesusedinmicrofabricationtoetchamaterialsothatthelayeryou'vedepositedwilllettheshapeyouwantedappear.Etchingisalargeenoughsubjecttowriteawholeencyclopediaaboutit.Ijustwanttoshowthemaindifferenc...

  • 2015-07-31

    Thispagetalkaboutthedifferentwaystodepositmaterialsinmicrotechnology(referedtowithbarbarianwordssuchaslpcvd,sputtering,evaporation-thermalande-beam,pecvdetc.).Itisnotatallexhaustive,butcorrespondstowhatIknow!Itisenoughtounderstandhowhighist...

  • 2015-07-31

    Lithographyisthestepthatallowsthedefinitionofthepatternonthesubstrate:thankstoapolymerresist,andusingaradiationsexposure,itfabricatesamaskabovethematerialtobepatterned.Itisacriticalsteptogettheshapesofthemicrostructures,eitherinMEMSormicroe...

  • 2015-07-31

    Lift-offprocessinmicrostructuringtechnologyisamethodofcreatingstructures(patterning)ofatargetmaterialonthesurfaceofasubstrate(ex.wafer)usingasacrificialmaterial(ex.Photoresist).Itisanadditivetechniqueasopposedtomoretraditionalsubtractingtec...

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